10.26165/JUELICH-DATA/66BLEL Lorenz, Janine0000-0002-4379-1127(Forschungszentrum Jülich (PGI-3))Linzen, Sven0000-0002-1807-728X(Leibniz Institute of Photonic Technology)Ziegler, Mario0000-0002-6878-7079(Leibniz Institute of Photonic Technology)Oelsner, Gregor0000-0003-2002-1979(Leibniz Institute of Photonic Technology)Stolz, Ronny0000-0002-5629-4672(Leibniz Institute of Photonic Technology)Tautz, F. Stefan0000-0003-3583-2379(Forschungszentrum Jülich (PGI-3))Lüpke, Felix0000-0002-6430-9627(Forschungszentrum Jülich (PGI-3))Il'ichev, Evgeni0000-0002-4621-5408(Leibniz Institute of Photonic Technology) Jülich DATA 2026 Raw data used in "Spatial homogeneity of superconducting order parameter in NbN films grown by atomic layer deposition". Folders are structured by sample: 4nm_NbN_on_Si, 5nm_NbN_on_Al2O3, 25nm_NbN_on_Si. Subfolders are structured by measurement type: STM - Scanning tunneling microscopy images, STS - Scanning tunneling spectroscopy spectra. STM data is supplied in HDF5 and JPEG formats. STS data is supplied in HDF5 format. Critical temperature vs film thickness data is supplied in CSV format. Lorenz, Janine(Forschungszentrum Jülich (PGI-3))