10.26165/JUELICH-DATA/YRLPL0 Leis, ArthurCherepanov, VasilyVoigtländer, BertTautz, F. Stefan Jülich DATA 2021 We provide here the raw data used to produce the figures in the publication Leis et al. Rev. Sci. Instrum., 2021, ??, DOI: ??. fig1a.png: Optical microscopy data used to produce figure 1a. fig2a.png, fig2b.png: Optical microscopy data used to produce figures 2a, 2b. fig2c.stp, fig2d.stp, fig2e.stp, fig2f.stp: Scanning tunneling microscopy data as acquired, used to produce figures 2c, 2d, 2e, 2f. WSxM format. 000_kalibrierung_tip1_9500mV_145458x81820nm.bmp to 038_kalibrierung_tip1_9500mV_145458x81820nm.bmp: Optical microscopy data used to produce figure 4. 000... and 038... are also used to produce figures 3a, 3b. fig5a.bmp: Optical microscopy data used to produce figure 5a. fig5b.stp: Scanning tunneling microscopy data as acquired, used to produce figures 2c, 2d, 2e, 2f. WSxM format. fig5c.dat, fig5c_inset.dat: Data used to produce figure 5c. ASCII format. optical_microscope_scaling.txt: Optical microscope scaling data. Leis, Arthur