Data used in: Spatial homogeneity of superconducting order parameter in NbN films grown by atomic layer depositionhttps://doi.org/10.26165/JUELICH-DATA/66BLELLorenz, JanineLinzen, SvenZiegler, MarioOelsner, GregorStolz, RonnyTautz, F. StefanLüpke, FelixIl'ichev, EvgeniJülich DATA2026-06-182026-06-18T09:23:32ZRaw data used in "Spatial homogeneity of superconducting order parameter in NbN films grown by atomic layer deposition". Folders are structured by sample: 4nm_NbN_on_Si, 5nm_NbN_on_Al2O3, 25nm_NbN_on_Si. Subfolders are structured by measurement type: STM - Scanning tunneling microscopy images, STS - Scanning tunneling spectroscopy spectra. STM data is supplied in HDF5 and JPEG formats. STS data is supplied in HDF5 format. Critical temperature vs film thickness data is supplied in CSV format.PhysicsLorenz, Janine and Linzen, Sven and Ziegler, Mario and Oelsner, Gregor and Stolz, Ronny and Tautz, Frank Stefan Stefan and Lüpke, Felix and Il'ichev, Evgeni, Spatial homogeneity of superconducting order parameter in NbN films grown by atomic layer deposition, Superconductor Science and Technology, 2026., doi, 10.1088/1361-6668/ae7838, https://doi.org/10.1088/1361-6668/ae7838Lorenz, Janine2026-06-15CCBY