<?xml version='1.0' encoding='UTF-8'?><codeBook xmlns="ddi:codebook:2_5" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="ddi:codebook:2_5 https://ddialliance.org/Specification/DDI-Codebook/2.5/XMLSchema/codebook.xsd" version="2.5"><docDscr><citation><titlStmt><titl>Replication Data for: Tailoring Li-Al-O Interphases in Garnet-Type Solid-State Electrolytes via Powder Atomic Layer Deposition</titl><IDNo agency="DOI">doi:10.26165/JUELICH-DATA/1XFQBW</IDNo></titlStmt><distStmt><distrbtr source="archive">Jülich DATA</distrbtr><distDate>2026-03-09</distDate></distStmt><verStmt source="DVN"><version date="2026-03-09" type="RELEASED">1</version></verStmt><biblCit>Steinhoff, Michael; Domgans, Anna; Ahmed, Jehad; Schierholz, Roland; Daniel, Davis Thomas; Aghdassi, Nabi; Yu, Shicheng; Tempel, Hermann; Eichel, Rüdiger-A., 2026, "Replication Data for: Tailoring Li-Al-O Interphases in Garnet-Type Solid-State Electrolytes via Powder Atomic Layer Deposition", https://doi.org/10.26165/JUELICH-DATA/1XFQBW, Jülich DATA, V1</biblCit></citation></docDscr><stdyDscr><citation><titlStmt><titl>Replication Data for: Tailoring Li-Al-O Interphases in Garnet-Type Solid-State Electrolytes via Powder Atomic Layer Deposition</titl><IDNo agency="DOI">doi:10.26165/JUELICH-DATA/1XFQBW</IDNo></titlStmt><rspStmt><AuthEnty affiliation="IET-1 Forschungszentrum Jülich GmbH">Steinhoff, Michael</AuthEnty><AuthEnty affiliation="IET-1 Forschungszentrum Jülich GmbH">Domgans, Anna</AuthEnty><AuthEnty affiliation="IET-1 Forschungszentrum Jülich GmbH">Ahmed, Jehad</AuthEnty><AuthEnty affiliation="IET-1 Forschungszentrum Jülich GmbH">Schierholz, Roland</AuthEnty><AuthEnty affiliation="IET-1 Forschungszentrum Jülich GmbH">Daniel, Davis Thomas</AuthEnty><AuthEnty affiliation="IET-1 Forschungszentrum Jülich GmbH">Aghdassi, Nabi</AuthEnty><AuthEnty affiliation="IET-1 Forschungszentrum Jülich GmbH">Yu, Shicheng</AuthEnty><AuthEnty affiliation="IET-1 Forschungszentrum Jülich GmbH">Tempel, Hermann</AuthEnty><AuthEnty affiliation="IET-1 Forschungszentrum Jülich GmbH, Faculty of Mechanical Engineering RWTH Aachen University">Eichel, Rüdiger-A.</AuthEnty><othId role="Data Collector">Steinhoff, Michael</othId><othId role="Data Collector">Domgans, Anna</othId><othId role="Data Collector">Ahmed, Jehad</othId><othId role="Data Collector">Schierholz, Roland</othId><othId role="Data Collector">Daniel, Davis Thomas</othId><othId role="Data Collector">Agdhassi, Nabi</othId><othId role="Supervisor">Yu, Shicheng</othId><othId role="Supervisor">Tempel, Hermann</othId><othId role="Supervisor">Eichel, Rüdiger-A.</othId></rspStmt><prodStmt><software>Velox</software><software version="4.1.0">TopSpin</software><software version="4.1.0">CasaXPS</software><software version="7">Diffrac.Topas</software><software version="7">Aztec</software><software version="7">EC-Lab</software><software version="7">Zview</software><grantNo agency="&quot;Forschungsinfrastruktur für zukünftige Batteriengenerationen&quot; (NextGenBat) from Bundesministerium für Forschung, Technologie und Raumfahrt">1703FI12</grantNo><grantNo agency="&quot;Interfaces and Interphases in Rechargeable Li Based Batteries: Cathode/Solid Electrolyte – Phase 2&quot; (CatSE2) from Bundesministerium für Forschung, Technologie und Raumfahrt">13XPO510A</grantNo></prodStmt><distStmt><distrbtr source="archive">Jülich DATA</distrbtr><contact affiliation="IET-1 Forschungszentrum Jülich GmbH" email="m.steinhoff@fz-juelich.de">Steinhoff, Michael</contact><contact affiliation="IET-1 Forschungszentrum Jülich GmbH" email="h.tempel@fz-juelich.de">Tempel, Hermann</contact><depositr>Steinhoff, Michael</depositr><depDate>2025-09-18</depDate></distStmt></citation><stdyInfo><subject><keyword>Chemistry</keyword></subject><abstract date="2025-09-18">&lt;h2>Study Overview&lt;/h2>&#xd;
&#xd;
&lt;p>&#xd;
In this study, the influence of atomic layer deposition (ALD) derived Li-Al-O interphases in garnet-type Li&lt;sub>6.4&lt;/sub>La&lt;sub>3&lt;/sub>Zr&lt;sub>1.4&lt;/sub>Ta&lt;sub>0.6&lt;/sub>O&lt;sub>12&lt;/sub> (LLZTO) solid-state electrolyte (SSE) was investigated. Garnet-type SSE are prone to lithium dendrite growth along interfaces, which causes short-circuits, significantly reducing cell performance. ALD offers high control over coating chemistry and morphology to precisly modify these interfaces in SSEs. Here, Al&lt;sub>2&lt;/sub>O&lt;sub>3&lt;/sub> ALD coatings were applied on LLZTO powder. MAS NMR, XPS and STEM analysis reveal the formation of a compositionally graded Li-Al-O interphase upon deposition due to proton-exchange-induced lithium diffusion. During high-temperature sintering, the ALD coating induces densification and considerable interdiffusion with LLZTO, resulting in a multi-phase microstructure which can be directly controlled via the ALD process, as confirmed by XRD, SEM and EDS measurments. Electrochemical testing reveals that medium-thickness coatings (~ 6.8 nm,  25 ALD cycles) yield optimal performance, exhibiting ionic conductivity at room temperature of 0.39 mS/cm with good Li-dendrite resitance and long-term cycling stability.&#xd;
&lt;/p>&#xd;
&#xd;
&lt;hr>&#xd;
&#xd;
&lt;h2>Dataset Description&lt;/h2>&#xd;
&#xd;
&lt;p>&#xd;
This dataset contains NMR, XPS, XRD, Ellipsometry, EDS line scans, and electrochemical measurements to investigate Li-Al-O interphases in LLZTO.&#xd;
&lt;/p>&#xd;
&#xd;
&lt;p>&#xd;
The dataset is organized into the following folders:&#xd;
&lt;/p>&#xd;
&#xd;
&lt;dl>&#xd;
&#xd;
&lt;dt>&lt;strong>NMR&lt;/strong>&lt;/dt>&#xd;
&lt;dd>&#xd;
&lt;sup>27&lt;/sup>Al Solid-state magic angle spinning nuclear magnetic resonance (MAS NMR) spectroscopy experiments were performed using an AvanceNEO spectrometer (Bruker). Data are stored in the folder &lt;code>NMR&lt;/code>.&#xd;
&lt;/dd>&#xd;
&#xd;
&lt;dt>&lt;strong>XPS&lt;/strong>&lt;/dt>&#xd;
&lt;dd>&#xd;
X-ray photoelectron spectroscopy (XPS) measurements of the Al 2p and C 1s region were conducted using a NEXSA G2 spectrometer (Thermo Fisher Scientific). Data are stored in the folder &lt;code>XPS&lt;/code>.&#xd;
&lt;/dd>&#xd;
&#xd;
&lt;dt>&lt;strong>XRD&lt;/strong>&lt;/dt>&#xd;
&lt;dd>&#xd;
X-ray diffraction (XRD) experiments were recorded using an Empyrean diffractometer (Pananalytical). Quantitative phase analysis (QPA) on the XRD diffractograms were conducted using the software package Diffrac.Topas version 7 (Bruker). The corresponding diffractograms and fitting data are stored in the folder &lt;code>XRD&lt;/code>.&#xd;
&lt;/dd>&#xd;
&#xd;
&lt;dt>&lt;strong>Ellipsometry&lt;/strong>&lt;/dt>&#xd;
&lt;dd>&#xd;
Ellipsometry data were recorded using a FS-8 spectroscopic ellipsometer (Film Sense LLC). Data are stored in the folder &lt;code>Ellipsometry&lt;/code>.&#xd;
&lt;/dd>&#xd;
&#xd;
&lt;dt>&lt;strong>Electrochemistry&lt;/strong>&lt;/dt>&#xd;
&lt;dd>&#xd;
Electrochemical impedance spectroscopy (EIS), critical current density (CCD) measurements, long-term plating/stripping experiments and chronoamperometry (CA) measurements were performed. Data are stored in the folder &lt;code>Electrochemistry&lt;/code>.&#xd;
&lt;/dd>&#xd;
&#xd;
&lt;dt>&lt;strong>EDS line profile&lt;/strong>&lt;/dt>&#xd;
&lt;dd>&#xd;
EDS line profiles were recorded using a FEI Titan G2 80-200 CREWLEY system. Data are stored in the folder &lt;code>EDS_line_profile&lt;/code>.&#xd;
&lt;/dd>&#xd;
&#xd;
&lt;/dl></abstract><sumDscr/></stdyInfo><method><dataColl><sources/></dataColl><anlyInfo/></method><dataAccs><setAvail/><useStmt/></dataAccs><othrStdyMat/></stdyDscr><otherMat ID="f46889" URI="https://data.fz-juelich.de/api/access/datafile/46889" level="datafile"><labl>Al2O3_reference_NMR.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46888" URI="https://data.fz-juelich.de/api/access/datafile/46888" level="datafile"><labl>Al2O3_reference_XPS_Al2p.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f47396" URI="https://data.fz-juelich.de/api/access/datafile/47396" level="datafile"><labl>EC_README.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f47384" URI="https://data.fz-juelich.de/api/access/datafile/47384" level="datafile"><labl>EDS_README.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46873" URI="https://data.fz-juelich.de/api/access/datafile/46873" level="datafile"><labl>Ellipsometry_README.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46861" URI="https://data.fz-juelich.de/api/access/datafile/46861" level="datafile"><labl>LiAlO2_reference_NMR.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46880" URI="https://data.fz-juelich.de/api/access/datafile/46880" level="datafile"><labl>LiAlO2_reference_XPS_Al2p.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46897" URI="https://data.fz-juelich.de/api/access/datafile/46897" level="datafile"><labl>LLZTO_100cycles_CA_1.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46879" URI="https://data.fz-juelich.de/api/access/datafile/46879" level="datafile"><labl>LLZTO_100cycles_CA_2.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46905" URI="https://data.fz-juelich.de/api/access/datafile/46905" level="datafile"><labl>LLZTO_100cycles_CCD.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46885" URI="https://data.fz-juelich.de/api/access/datafile/46885" level="datafile"><labl>LLZTO_100cycles_EIS.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46887" URI="https://data.fz-juelich.de/api/access/datafile/46887" level="datafile"><labl>LLZTO_100cycles_Longterm.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46890" URI="https://data.fz-juelich.de/api/access/datafile/46890" level="datafile"><labl>LLZTO_100cycles_NMR.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46883" URI="https://data.fz-juelich.de/api/access/datafile/46883" level="datafile"><labl>LLZTO_100cycles_QPA_fit.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46863" URI="https://data.fz-juelich.de/api/access/datafile/46863" level="datafile"><labl>LLZTO_100cycles_QPA_plot.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46871" URI="https://data.fz-juelich.de/api/access/datafile/46871" level="datafile"><labl>LLZTO_100cycles_XPS_Al2p.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46898" URI="https://data.fz-juelich.de/api/access/datafile/46898" level="datafile"><labl>LLZTO_100cycles_XRD.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46901" URI="https://data.fz-juelich.de/api/access/datafile/46901" level="datafile"><labl>LLZTO_10cycles_CA_1.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46860" URI="https://data.fz-juelich.de/api/access/datafile/46860" level="datafile"><labl>LLZTO_10cycles_CA_2.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46886" URI="https://data.fz-juelich.de/api/access/datafile/46886" level="datafile"><labl>LLZTO_10cycles_CCD.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46906" URI="https://data.fz-juelich.de/api/access/datafile/46906" level="datafile"><labl>LLZTO_10cycles_EIS.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46904" URI="https://data.fz-juelich.de/api/access/datafile/46904" level="datafile"><labl>LLZTO_10cycles_Longterm.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46895" URI="https://data.fz-juelich.de/api/access/datafile/46895" level="datafile"><labl>LLZTO_10cycles_QPA_fit.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46868" URI="https://data.fz-juelich.de/api/access/datafile/46868" level="datafile"><labl>LLZTO_10cycles_QPA_plot.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46903" URI="https://data.fz-juelich.de/api/access/datafile/46903" level="datafile"><labl>LLZTO_10cycles_XRD.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46878" URI="https://data.fz-juelich.de/api/access/datafile/46878" level="datafile"><labl>LLZTO_25cycles_CA_1.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46875" URI="https://data.fz-juelich.de/api/access/datafile/46875" level="datafile"><labl>LLZTO_25cycles_CA_2.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46874" URI="https://data.fz-juelich.de/api/access/datafile/46874" level="datafile"><labl>LLZTO_25cycles_CCD.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46865" URI="https://data.fz-juelich.de/api/access/datafile/46865" level="datafile"><labl>LLZTO_25cycles_EIS.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46899" URI="https://data.fz-juelich.de/api/access/datafile/46899" level="datafile"><labl>LLZTO_25cycles_Longterm.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46864" URI="https://data.fz-juelich.de/api/access/datafile/46864" level="datafile"><labl>LLZTO_25cycles_QPA_fit.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46862" URI="https://data.fz-juelich.de/api/access/datafile/46862" level="datafile"><labl>LLZTO_25cycles_QPA_plot.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46884" URI="https://data.fz-juelich.de/api/access/datafile/46884" level="datafile"><labl>LLZTO_25cycles_XRD.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46908" URI="https://data.fz-juelich.de/api/access/datafile/46908" level="datafile"><labl>LLZTO_50cycles_CA_1.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46866" URI="https://data.fz-juelich.de/api/access/datafile/46866" level="datafile"><labl>LLZTO_50cycles_CA_2.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46892" URI="https://data.fz-juelich.de/api/access/datafile/46892" level="datafile"><labl>LLZTO_50cycles_CCD.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46896" URI="https://data.fz-juelich.de/api/access/datafile/46896" level="datafile"><labl>LLZTO_50cycles_EIS.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46867" URI="https://data.fz-juelich.de/api/access/datafile/46867" level="datafile"><labl>LLZTO_50cycles_Longterm.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46876" URI="https://data.fz-juelich.de/api/access/datafile/46876" level="datafile"><labl>LLZTO_50cycles_QPA_fit.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46902" URI="https://data.fz-juelich.de/api/access/datafile/46902" level="datafile"><labl>LLZTO_50cycles_QPA_plot.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46869" URI="https://data.fz-juelich.de/api/access/datafile/46869" level="datafile"><labl>LLZTO_50cycles_XRD.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46877" URI="https://data.fz-juelich.de/api/access/datafile/46877" level="datafile"><labl>LLZTO_Pristine_QPA_fit.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46882" URI="https://data.fz-juelich.de/api/access/datafile/46882" level="datafile"><labl>LLZTO_Pristine_QPA_plot.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46893" URI="https://data.fz-juelich.de/api/access/datafile/46893" level="datafile"><labl>LLZTO_pristine_XPS_C1s.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46900" URI="https://data.fz-juelich.de/api/access/datafile/46900" level="datafile"><labl>LLZTO_Pristine_XRD.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f47386" URI="https://data.fz-juelich.de/api/access/datafile/47386" level="datafile"><labl>Long_range_Al.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f47383" URI="https://data.fz-juelich.de/api/access/datafile/47383" level="datafile"><labl>Long_range_La.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f47389" URI="https://data.fz-juelich.de/api/access/datafile/47389" level="datafile"><labl>Long_range_O.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f47395" URI="https://data.fz-juelich.de/api/access/datafile/47395" level="datafile"><labl>Long_range_Ta.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f47387" URI="https://data.fz-juelich.de/api/access/datafile/47387" level="datafile"><labl>Long_range_Zr.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46891" URI="https://data.fz-juelich.de/api/access/datafile/46891" level="datafile"><labl>NMR_README.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f47388" URI="https://data.fz-juelich.de/api/access/datafile/47388" level="datafile"><labl>README.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f47393" URI="https://data.fz-juelich.de/api/access/datafile/47393" level="datafile"><labl>Short_range_Al.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f47394" URI="https://data.fz-juelich.de/api/access/datafile/47394" level="datafile"><labl>Short_range_BF.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f47390" URI="https://data.fz-juelich.de/api/access/datafile/47390" level="datafile"><labl>Short_range_La.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f47392" URI="https://data.fz-juelich.de/api/access/datafile/47392" level="datafile"><labl>Short_range_O.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f47385" URI="https://data.fz-juelich.de/api/access/datafile/47385" level="datafile"><labl>Short_range_Ta.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f47391" URI="https://data.fz-juelich.de/api/access/datafile/47391" level="datafile"><labl>Short_range_Zr.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46911" URI="https://data.fz-juelich.de/api/access/datafile/46911" level="datafile"><labl>Si_reference_100cycles_Ellipsometry_1.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46913" URI="https://data.fz-juelich.de/api/access/datafile/46913" level="datafile"><labl>Si_reference_100cycles_Ellipsometry_2.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46912" URI="https://data.fz-juelich.de/api/access/datafile/46912" level="datafile"><labl>Si_reference_100cycles_Ellipsometry_3.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46872" URI="https://data.fz-juelich.de/api/access/datafile/46872" level="datafile"><labl>XPS_README.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat><otherMat ID="f46907" URI="https://data.fz-juelich.de/api/access/datafile/46907" level="datafile"><labl>XRD_README.txt</labl><notes level="file" type="DATAVERSE:CONTENTTYPE" subject="Content/MIME Type">text/plain</notes></otherMat></codeBook>