Data used in: Spatial homogeneity of superconducting order parameter in NbN films grown by atomic layer depositiondoi:10.26165/JUELICH-DATA/66BLELJülich DATA2026-06-181Lorenz, Janine; Linzen, Sven; Ziegler, Mario; Oelsner, Gregor; Stolz, Ronny; Tautz, F. Stefan; Lüpke, Felix; Il'ichev, Evgeni, 2026, "Data used in: Spatial homogeneity of superconducting order parameter in NbN films grown by atomic layer deposition", https://doi.org/10.26165/JUELICH-DATA/66BLEL, Jülich DATA, V1Data used in: Spatial homogeneity of superconducting order parameter in NbN films grown by atomic layer depositiondoi:10.26165/JUELICH-DATA/66BLELLorenz, JanineLinzen, SvenZiegler, MarioOelsner, GregorStolz, RonnyTautz, F. StefanLüpke, FelixIl'ichev, EvgeniJülich DATALorenz, JanineLorenz, Janine2026-06-15PhysicsRaw data used in "Spatial homogeneity of superconducting order parameter in NbN films grown by atomic layer deposition". Folders are structured by sample: 4nm_NbN_on_Si, 5nm_NbN_on_Al2O3, 25nm_NbN_on_Si. Subfolders are structured by measurement type: STM - Scanning tunneling microscopy images, STS - Scanning tunneling spectroscopy spectra. STM data is supplied in HDF5 and JPEG formats. STS data is supplied in HDF5 format. Critical temperature vs film thickness data is supplied in CSV format.10.1088/1361-6668/ae7838Lorenz, Janine and Linzen, Sven and Ziegler, Mario and Oelsner, Gregor and Stolz, Ronny and Tautz, Frank Stefan Stefan and Lüpke, Felix and Il'ichev, Evgeni, Spatial homogeneity of superconducting order parameter in NbN films grown by atomic layer deposition, Superconductor Science and Technology, 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