10.26165/JUELICH-DATA/0X7H3SSchäpers, ThomasThomasSchäpers0000-0001-7861-5003Peter Grünberg Institute 9Jülich DATA2025Physicsburied gatessemiconductor nanowirequantum dotSchäpers, ThomasThomasSchäpersPeter Grünberg Institute 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WaiverSemiconductor nanowires can be utilized to create quantum dot qubits. The formation of quantum dots is typically achieved by means of bottom gates created by a lift-off process. As an alternative, we fabricated flat buried bottom gate structures by filling etched trenches in a Si substrate with sputtered TiN, followed by mechanical polishing. This method achieved gate line pitches as small as 60 nm. The gate fingers have low gate leakage. As a proof of principle, we fabricated quantum dot devices using InAs nanowires placed on the gate fingers. These devices exhibit single electron tunneling and Coulomb blockade.