10.26165/JUELICH-DATA/66BLELLorenz, JanineJanineLorenz0000-0002-4379-1127Forschungszentrum Jülich (PGI-3)Linzen, SvenSvenLinzen0000-0002-1807-728XLeibniz Institute of Photonic TechnologyZiegler, MarioMarioZiegler0000-0002-6878-7079Leibniz Institute of Photonic TechnologyOelsner, GregorGregorOelsner0000-0003-2002-1979Leibniz Institute of Photonic TechnologyStolz, RonnyRonnyStolz0000-0002-5629-4672Leibniz Institute of Photonic TechnologyTautz, F. StefanF. StefanTautz0000-0003-3583-2379Forschungszentrum Jülich (PGI-3)Lüpke, FelixFelixLüpke0000-0002-6430-9627Forschungszentrum Jülich (PGI-3)Il'ichev, EvgeniEvgeniIl'ichev0000-0002-4621-5408Leibniz Institute of Photonic TechnologyData used in: Spatial homogeneity of superconducting order parameter in NbN films grown by atomic layer depositionJülich DATA2026PhysicsLorenz, JanineJanineLorenzForschungszentrum Jülich (PGI-3)2026-06-152026-06-1810.1088/1361-6668/ae78389422084070182395823498236982495825168231182297823968238682558824628244282422824578237182394824058245182583825148248282530826608231182403823828245482617824418238782301823828231982233823808230482439824598248382554825598237982427823208256382448824808254082247824799511433953390700906059056590949907789063490857906029057690654907039074490552905939056390608908409063790797907929056190712909469072490675906149060690629905839063090673905739078590773905419053290550905049061790703907999076690610906999056290613906489094390548905829096290485908119052990856906259078390684906169059090637905349065590581906229066490619906129071790581908039087190631909029063590874908799055090589907519051990623908079073590627906259061390591906629088090866906509062490630906119052090542908489057190597904919084490807907529088790778905169060690887909019056790823911029055090853905589059890958905879067590898905179068890548908429063090655905399068290882906059066090637908509088090641906519060090881907889056190563910129062890899908319050290826908239057390846905589058990563908919055690589905449055490765906239085690579906229053390633906279082690796905719056990675905739064190933908509064990912906119091290603906319070690611906539078090597905689081890583908709081290870908519049490558905769053590629907669580395694959449564895764958379574195643959319572495784956779595195646956289557495750959329552395881956749574295984956089594095903957749598095912956759588895918958549578495995959779596695703957679588895735957089577395771957699581495677957379585495805958089582795738958919570295748958699590795763957349594895619958849601895704959369561995713957009571795848957309592095676957659583995784956079557195721957209596595909957039566495657958729579495623955579594495830959339588895724957789592295928955849584195890958679562795634957909568295861958669583195638958729567895910956419587595664957089569895786958759585095950958449557695718959409590395722957419590295726956679567995685956469597195631958099580395889957129572495724958939595096070956859566995688958279591895872959739574095740958799588795905959639591795878959089566595692957339558895702957579571396066960119568895927957259568495959958029590395647959519575195562959479587395809958899584195737959419574595772958199590595823957809592795766956569576195835179873730069184application/x-h5image/jpegapplication/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5image/jpegapplication/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5application/x-h5ap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data used in "Spatial homogeneity of superconducting order parameter in NbN films grown by atomic layer deposition".
Folders are structured by sample:
4nm_NbN_on_Si,
5nm_NbN_on_Al2O3,
25nm_NbN_on_Si.
Subfolders are structured by measurement type:
STM - Scanning tunneling microscopy images,
STS - Scanning tunneling spectroscopy spectra.
STM data is supplied in HDF5 and JPEG formats. STS data is supplied in HDF5 format. Critical temperature vs film thickness data is supplied in CSV format.